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We demonstrate compact multimode interference (MMI) couplers on silicon-on-insulator that exhibit both high performance and relaxed tolerances. The devices are fabricated with a single shallow etch step on 1.5-mum-thick silicon, and have a footprint of 12.8 mum times 456 mum, including 100-mum-long tapers at input and output. In a Mach-Zehnder configuration, we achieve an extinction ratio larger than 22 dB for transverse-electric polarization and larger than 20 dB for transverse-magnetic polarization. This extinction ratio is maintained in the full 1520- to 1580-nm band and for MMI width variations in a range of 0.45 mu m. We also show appreciable tolerance differences between paired and general excitation MMIs.
Published in:
Photonics Technology Letters, IEEE
(Volume:21
,
Issue:
21
)
Date of Publication: Nov.1, 2009
- Page(s):
- 1600 - 1602
- ISSN :
- 1041-1135
- INSPEC Accession Number:
- 10916471
- Digital Object Identifier :
- 10.1109/LPT.2009.2030689
- Product Type:
- Journals & Magazines
- Date of Publication :
- 25 August 2009
- Date of Current Version :
- 09 October 2009
- Issue Date :
- Nov.1, 2009
- Sponsored by :
- IEEE Photonics Society
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