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MOEMS Accelerometer Based on Microfiber Knot Resonator

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6 Author(s)
Yu Wu ; Key Lab. of Broadband Opt. Fiber Transm. & Commun. Networks (Educ. Minist. of China), Univ. of Electron. Sci. & Technol. of China, Chengdu, China ; Xu Zeng ; Yun-Jiang Rao ; Yuan Gong
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A microelectromechanical system (MEMS)-based optical accelerometer combined with a microfiber knot resonator (MKR) is proposed and demonstrated. The 386-mum-diameter MKR, fabricated by a 1.1-mu m-diameter microfiber, has a high quality factor (Q-factor) of 8500 and acts as the sensing device for vibration measurement of the MEMS structure. The experimental results show that such an accelerometer has a sensitivity of 654.7 mV/g, and a dynamic range of 20 g. This sensitivity can be further improved by increasing the Q-factor of the MKR, which can be achieved by optimizing the optical and geometrical parameters of the microfiber.

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Photonics Technology Letters, IEEE  (Volume:21 ,  Issue: 20 )