MOEMS Accelerometer Based on Microfiber Knot Resonator

A microelectromechanical system (MEMS)-based optical accelerometer combined with a microfiber knot resonator (MKR) is proposed and demonstrated. The 386-$\mu$m-diameter MKR, fabricated by a 1.1-$\mu$ m-diameter microfiber, has a high quality factor ( $Q$-factor) of 8500 and acts as the sensing device for vibration measurement of the MEMS structure. The experimental results show that such an accelerometer has a sensitivity of 654.7 mV/g, and a dynamic range of 20 g. This sensitivity can be further improved by increasing the $Q$-factor of the MKR, which can be achieved by optimizing the optical and geometrical parameters of the microfiber.