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A post processing method for reducing substrate coupling in mixed-signal integrated circuits

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2 Author(s)
Basedau, P. ; Integrated Syst. Lab., Swiss Federal Inst. of Technol., Zurich, Switzerland ; Qiuting Huang

Due to the heavily doped substrate material in modern MOS technologies, digital interference couples to sensitive analog nodes much more easily than in technologies with p/sup -/ substrates. The guard ring method of isolating sensitive nodes is no longer as effective as before. In this contribution we investigate the isolation of analog circuits by etching a gap between analog and digital circuits from the back of the wafer. Experiments show that interference coupling 35 dB above noise floor is completely removed when a gap is etched around the analog circuit.

Published in:

VLSI Circuits, 1995. Digest of Technical Papers., 1995 Symposium on

Date of Conference:

8-10 June 1995