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Capacitive Silicon Micro-accelerometer Detecting Technology Research

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3 Author(s)
Yan Li ; Coll. of Mech. & Electr. Eng., Henan Agric. Univ., Zhengzhou, China ; Ling Wang ; Jun Liu

In order to increase the capacitive accelerometer testing accuracy, to increase its usefulness, the comb-capacitive accelerometer is selected, the use of capacitive differential detection principle to detect acceleration changes; Based on the capacitance charge-discharge characteristics, design the small differential capacitance detection circuit, including C-V converter, differential amplification, full-wave rectifier. Each module for the simulation. Finally, capacitive accelerometer do the static test and dynamic test on the two state linearity comparison shows that this design increase not only the capacitive accelerometer linearity, but also its usefulness.

Published in:

2009 International Conference on Measuring Technology and Mechatronics Automation  (Volume:1 )

Date of Conference:

11-12 April 2009