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Stiction in large area imprint lithography was studied by a microtribological approach. As imprinting area is expanded, fine aligning movement can be hindered by the adhesion or in-plane friction between the mold and the substrate. In this study, an analytical model for stiction force in the alignment process was proposed and evaluated by measuring the friction force between two plates mediated by a thin liquid film. Experimental verification was conducted for various geometries and surface conditions. Analytic and experimental results demonstrated that the meniscus force induced from surface tension was the most critical parameter affecting stiction in an alignment process.
Published in:
Applied Physics Letters
(Volume:95
,
Issue:
5
)
Date of Publication: Aug 2009
- Page(s):
- 053110 - 053110-3
- ISSN :
- 0003-6951
- Digital Object Identifier :
- 10.1063/1.3190507
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 07 August 2009
- Issue Date :
- Aug 2009
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