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Fabrication of submicron Si spheres on SOI platform by using excimer laser reformation technique

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4 Author(s)
S. C. Hung ; Graduate Institute of Photonics and Optoelectronics, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei, Taiwan ; S. C. Shiu ; C. S. Chao ; C. F. Lin

Since silicon is the dominating material in current integrated circuit industry, fabricating microspheres on a Si-based substrate contributes to compact and low-cost photonics for mass-market applications. The authors present a technique applying the homogenized KrF excimer laser reformation to fabricate crystalline Si spheres on the SOI platform.

Published in:

Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on

Date of Conference:

14-19 June 2009