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Optical performance investigation of focused ion beam nanostructured integrated Fabry-Perot microcavities in Al2O3

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5 Author(s)
Ay, F. ; Integrated Opt. Microsyst. (IOMS) Group, Univ. of Twente, Enschede, Netherlands ; Bradley, J.D.B. ; Worhoff, K. ; de Ridder, R.M.
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Focused ion beam (FIB) milling is an emerging technology that enables fast, reliable and well-controlled nanometer-size feature definition. Since the method involves physical removal of material by a beam of ions, the technique can be adapted and optimized almost for any material system.

Published in:

Lasers and Electro-Optics 2009 and the European Quantum Electronics Conference. CLEO Europe - EQEC 2009. European Conference on

Date of Conference:

14-19 June 2009