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An electromagnetic self-powered vibration energy scavenger is developed, which can convert low-level vibrational energy into electrical energy. It consists of a magnet-spring system and a two-layer copper coil. The nickel planar spring and the two-layer copper coil are fabricated using UV-LIGA technology and microelectroplating technology. Testing results show that the fabricated vibration energy scavenger can generate a maximum load voltage of 62 mV and a maximum power of 6.4 muW, at an input frequency of 247.5 Hz and an acceleration of 10 m/s2.