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Fabrication and characterization of Er-doped Silicon-Rich Oxide toroidal microcavities on chip

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5 Author(s)
Jager, J.B. ; Lab. SINAPS, CEA-Grenoble MINATEC, Grenoble, France ; Noe, P. ; Picard, E. ; Delamadeleine, E.
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The fabrication process of Ultrahigh-Q toroidal microcavities and integration of erbium-doped silicon-rich oxide thin film inside these structures are reported. Using micro-photoluminescence setup, we achieve selective detection of whispering gallery modes at room temperature. Quality factors as high as 3200 are measured, limited by the setup resolution.

Published in:

Transparent Optical Networks, 2009. ICTON '09. 11th International Conference on

Date of Conference:

June 28 2009-July 2 2009