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Transparent ITO-Mn:ITO Thin-Film Thermocouples

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2 Author(s)
S. R. Sarath Kumar ; Dept. of Phys., Indian Inst. of Technol. Madras, Chennai, India ; S. Kasiviswanathan

Transparent thin-film thermocouples have been fabricated with indium tin oxide (ITO) and manganese doped indium tin oxide (Mn:ITO) as the positive and negative legs, respectively. Optical transparency of the thermocouples was above 85% in the visible region of the spectrum. Presence of Mn has been found to enhance the thermoelectric response, without significantly increasing the resistivity. Seebeck voltages of ~ 20 mV and ~ 31 mV have been obtained at 625 K, respectively, for the thermocouples with Mn:ITO legs having 1.6 at.% and 4.3 at.% Mn. The response has been found to be reproducible with an error of plusmn2%.

Published in:

IEEE Sensors Journal  (Volume:9 ,  Issue: 7 )