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The series resistance, R sd in silicon nanowire FETs (Si-NWFET) is extracted unambiguously, using the Y -function technique, in conjunction with the drain current and transconductance data. The volume channel inversion in Si-NWFET renders the charge carriers relatively free of the surface scattering and concomitant degradation of mobility. As a result, the Y -function of Si-NWFET is shown to exhibit a linear behavior in strong inversion, thereby enabling accurate extraction of R sd. The technique is applied to nanowire devices with channel lengths 82, 86, 96, 106, 132, and 164 nm, respectively. The extracted R sd values are shown nearly flat with respect to the gate voltage, as expected from Ohmic contacts but showed a large variation for all channel lengths examined. This indicates the process parameters involved in the formation of series contacts vary considerably from device to device. The present method only requires a single device for extraction of R sd and the iteration procedure for data fitting is fast and stable.