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New algorithm in transit-time ultrasonic flow meter has been developed for high-speed and precise requirements in semiconductor industries. Differential correlation method is used for transit-time difference calculation, and linear interpolation is applied to enhance the accuracy and precision. Single transit-times are also detected for sound speed correction. This algorithm which was proved with good stability and precision in this paper was done in a single chip of FPGA, and its performances were verified by simulations and experiments.