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Enhancement of micromechanical resonator manufacturing precision via mechanically-coupled arraying

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6 Author(s)
Yang Lin ; Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, 94720, USA ; Wei-Chang Li ; Bongsang Kim ; Yu-Wei Lin
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A statistical comparison between the resonance frequency variations of stand-alone micromechanical disk resonators and mechanically-coupled array composites of them reveals that mechanically-coupled arraying of on-chip micromechanical resonators can very effectively enhance the manufacturing repeatability of resonance frequencies. In particular, twenty 3-disk resonator array-composites on a single die achieve a measured resonance frequency standard deviation as small as 165.7 ppm around a 61.25 MHz average, which is significantly smaller than the 316.4 ppm measured for twenty stand-alone disk resonators on the same die. This new standard deviation reduces the expected filter percent bandwidth achievable with a 90% confidence interval without the need for trimming from the 1.89% of previous work to now just 0.86%. Larger arrays should further reduce the frequency standard deviation, perhaps to the point of allowing trim-free RF channel-select bandwidths with reasonable manufacturing confidence interval.

Published in:

2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum

Date of Conference:

20-24 April 2009