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Surface plasmon propagation in nano scaled waveguide containing a semiconductor film embedded in dielectric media is studied in this paper. The analytical dispersion relation is reached for the symmetric and antisymmetric mode. The propagation characteristics is analyzed for various material and structural parameters. As an application to integrated waveguide elements, a garnet layer bonded on semiconductor-on-insulator waveguide structure, is considered. The nonreciprocal phase shift as a function of the propagating semiconductor layer thickness at different wavelengths is also studied.