Referenced Items are not available for this document.
Grazing incidence small angle x-ray scattering study of the structure of nanoporous ultralow-
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This paper focuses on the structure of nanoporous SiOCH thin films deposited using a porogen approach by plasma enhanced chemical vapor deposition (PECVD). The grazing incidence small angle x-ray scattering signal demonstrates the existence of a biphase pattern in hybrid films, deposited by PECVD. After porogen removal, there are few differences between pore pattern of optimized ultraviolet (UV) illuminated and thermally treated samples: anisotropy of the pore pattern is observed in both samples, probably due to the porogen degradation. Finally, a kinetic study of porogen degradation by UV shows that the porous structure develops in only a few minutes.
Published in:
Applied Physics Letters
(Volume:95
,
Issue:
2
)
Date of Publication: Jul 2009
- Page(s):
- 022901 - 022901-3
- ISSN :
- 0003-6951
- Digital Object Identifier :
- 10.1063/1.3168521
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 17 July 2009
- Issue Date :
- Jul 2009
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