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This paper presents a complete design and development procedure of a new XY micromanipulator for two-dimensional (2-D) micromanipulation applications. The manipulator possesses both a nearly decoupled motion and a simple structure, which is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on pseudo-rigid-body (PRB) simplification approach, the mathematical models predicting kinematics, statics, and dynamics of the XY stage have been obtained, which are verified by the finite-element analysis (FEA) and then integrated into dimension optimization via the particle swarm optimization (PSO) method. Moreover, a prototype of the micromanipulator is fabricated and calibrated using a microscope vision system, and visual servo control employing a modified PD controller is implemented for the accuracy improvement. The experiments discover that a workspace size of 260 mum times 260 mum with a 2-D positioning accuracy and repeatability around 0.73 and 1.02 mum, respectively, can be achieved by the micromanipulator.
Automation Science and Engineering, IEEE Transactions on (Volume:6 , Issue: 4 )
Date of Publication: Oct. 2009