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High-Voltage LDMOS With Charge-Balanced Surface Low On-Resistance Path Layer

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5 Author(s)
Bo Zhang ; State Key Lab. of Electron. Thin Films & Integrated Devices, Univ. of Electron. Sci. & Technol. of China, Chengdu, China ; Wenlian Wang ; Wanjun Chen ; Zhaoji Li
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A high-voltage lateral double-diffusion MOSFET (LDMOS) with a charge-balanced surface low on-resistance path (CBSLOP) layer is proposed and experimentally demonstrated using a modified CMOS process. The CBSLOP layer can not only provide a low on-resistance path in the on-state but also keep the charge balance between the N and P pillars of a surface low on-resistance path in the off-state, which results in improved breakdown voltage (BV). The experimental results show that the CBSLOP-LDMOS with a drift length of 35 mum exhibits a BV of 500 V and specific on-resistance (R on, sp) of 96 mOmega ldr cm2, yielding to a power figure of merit (BV 2/ R on, sp) of 2.6 MW/cm2 . The excellent device performances, coupled with a CMOS-compatible fabrication process, make the proposed CBSLOP-LDMOS a promising candidate for smart power integrated circuit.

Published in:

Electron Device Letters, IEEE  (Volume:30 ,  Issue: 8 )