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This special session describes emerging modeling and control problems and solutions for integrated systems that operate at the micro and nano length scales. Complete integrated systems can be as small as millimeters across, which can include dozens of individual components with sizes ranging from nanometers to 100s of microns. These integrated systems typically incorporate such elements as microelectronics, photonics, micro-cantilevers, and microfluidics. These small-scale systems are typically manufactured by using techniques for integrated circuits and/or polymer-based techniques such as micro-injection molding and micro-imprinting. Models and control designs for these systems typically have to be adjusted to account for or utilize the characteristics of small length scales. The special session will have three presentations that describe a variety of micro and nanosystems and their associated modeling and control problems.