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Schottky barrier (SB) S/D nanowire transistor (SB-NWT) is considered to be one of the candidates for future CMOS technology due to the combination of the advantages both from silicon nanowire (NW) transistor (SNWT) and metal S/D. However, previous studies, both simulations and experiments, show that the electrostatic properties (EPs) of SB-NWTs are not promising. In this paper, SB-NWTs is comprehensively studied in comparison with SNWTs. The SB impact is found to be responsible for the degraded EPs and contributes to unexpectedly large linear region resistance (Rlin). Several approaches to minimize the SB impact are studied and limitations of the approaches are investigated in comparison with SNWTs. Whether SB-NWTs can show better performance than SNWTs will be further discussed.
Date of Conference: 27-29 April 2009