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Design optimization of cantilever Beam MEMS switch

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5 Author(s)
Yanjue Gong ; Coll. of Mech. Eng., Beijing Technol. & Bus. Univ., Beijing, China ; Li Zhang ; Fu Zhao ; Chunling Meng
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This paper takes the cantilever beam MEMS switch as an research object to discuss its mechanical principle and carry out optimal design. Four kinds of cantilever beams with different sections are selected to analysis their mode frequencies. Referring the larger mode frequency of MEMS structure, an optimal design solution has been introduced to determine a group of reasonable structure parameters which improve the dynamic stiffness of the switch. Finally, the random response and harmonic response analysis are implemented to validate the optimal design.

Published in:

Industrial Mechatronics and Automation, 2009. ICIMA 2009. International Conference on

Date of Conference:

15-16 May 2009