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The digital micromirror device for projection display

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2 Author(s)
Feather, G.A. ; Texas Instrum. Inc., Dallas, TX, USA ; Monk, D.W.

The digital micromirror device is the product of a technological development program which began at Texas instruments over 15 years ago. It is a micro-electromechanical system, MEMS, device which includes an array of mirrors fabricated above CMOS static RAM memory elements. Rapid switching of the diagonally hinged mirrors allows incident light to be modulated to form the highest quality video images for projection display systems. Recent developments, discussed here, improve the optical and electronic performance as well as reduce the required number of active elements

Published in:

Wafer Scale Integration, 1995. Proceedings., Seventh Annual IEEE International Conference on

Date of Conference:

18-20 Jan 1995

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