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Monolithically Integrated Photodetector Array With a Multistep Cavity for Multiwavelength Receiving Applications

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8 Author(s)
Xiaofeng Duan ; Key Lab. of Inf. Photonics & Opt. Commun., Beijing Univ. of Posts & Telecommun., Beijing, China ; Yongqing Huang ; Hui Huang ; Xiaomin Ren
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A monolithically integrated photodetector array used for multiwavelength receiving was realized by growth of an InP-In0.53Ga0.47As-InP p-i-n structure on a GaAs/AlGaAs Fabry-Perot filter. The filter with a multistep cavity was fabricated by wet etching and regrowth. Each photodetector in the array detects a different wavelength, so the array functions as a multiwavelength receiver. The high-quality GaAs/InP heteroepitaxy was realized by employing a thin low temperature buffer layer. The photodetector array detects four wavelength channels, whose interval is about 10 nm , around 1550 nm. A full-width half-maximum less than 0.5 nm , a peak quantum efficiency over 15%, and a 3-dB bandwidth of 9 GHz were simultaneously obtained in the photo-detector array.

Published in:

Journal of Lightwave Technology  (Volume:27 ,  Issue: 21 )