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We investigated the ex-situ conversion process of amorphous precursor films for SmBa2Cu3O7-delta (SmBCO) coated conductors (CC). Amorphous precursor films were first deposited on the LaMnO3/homoepi-MgO/ IBAD-MgO/Y2O3/Al2O3/Hastelloy substrate by e-beam co-evaporation and subsequently crystallized to the superconducting phase at various post-annealing temperatures in two different reduced oxygen pressures. In 100 ppm of O2 in Ar, c-axis oriented SmBCO grains with minor a-axis oriented grains were grown at 825degC whereas polycrystalline SmBCO film with some a -axis oriented grains was formed at 800degC. In the temperature region of 825 ~ 850degC, protruded spots were observed on the sample surface. In 6 ppm of O2 in Ar, SmBCO film composed of a-axis oriented SmBCO grains with partial c-axis oriented grains were obtained at 700degC but other phases were formed above 725degC. The SmBCO sample grown at 700degC exhibited Tc ,zero value of 90.2 K. However, its Jc value at 77 K was negligibly small due to the formation of a-axis oriented grains.