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Characteristics of High- T_{\rm c} Josephson Junction Fabricated by Focused Ion Beam and Ion Damage

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5 Author(s)
Chiu-Hsien Wu ; Dept. of Phys., Nat. Chung Hsing Univ., Taichung, Taiwan ; Wei-Cheng Kuo ; Yu-Te Chou ; Jau-Han Chen
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A high-Tc Josephson junction and superconducting quantum interference devices (SQUIDs) were fabricated by focused ion beam (FIB) milling and 150 keV oxygen ion implantation. A single layer gold mask with a small aperture of 28-73 nm defined by direct milling with FIB, was used. The voltage versus current characteristics of high-Tc YBa2Cu3O7-x Josephson junctions were measured under microwaves. Shapiro steps were observed in the single junction. The voltage versus current and voltage versus magnetic field characteristics of a SQUID were measured.

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Applied Superconductivity, IEEE Transactions on  (Volume:19 ,  Issue: 3 )