Referenced Items are not available for this document.
Suppressed Critical Current in Superconducting Nanowire Single-Photon Detectors
In this work we present a new fabrication process that enabled the fabrication of superconducting nanowire single photon detectors SNSPD with fill-factors as high as 88% with gaps between nanowires as small as 12 nm. This fabrication process combined high-resolution electron-beam lithography with photolithography. Although this work was motivated by the potential of increased detection efficiency with higher fill-factor devices, test results showed an unexpected systematic suppression in device critical currents with increasing fill-factor.
Published in:
Applied Superconductivity, IEEE Transactions on
(Volume:19
,
Issue:
3
)
Date of Publication: June 2009
- Page(s):
- 318 - 322
- ISSN :
- 1051-8223
- INSPEC Accession Number:
- 10781719
- Digital Object Identifier :
- 10.1109/TASC.2009.2017953
- Product Type:
- Journals & Magazines
- Date of Publication :
- 30 June 2009
- Date of Current Version :
- 17 July 2009
- Issue Date :
- June 2009
- Sponsored by :
- The IEEE Council on Superconductivity
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