By Topic

The application of scattering cross sections to ion flux models in discharge sheaths

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Phelps, A.V. ; Joint Institute for Laboratory Astrophysics, University of Colorado and National Institute of Standards and Technology, Boulder, Colorado 80309‐0440

Your organization might have access to this article on the publisher's site. To check, click on this link: 

We suggest consistent sets of Ar++Ar and Ar+++Ar differential and integral cross sections for modeling ion scattering that take into account differential scattering data and the fact that symmetric charge transfer collisions are one aspect of elastic scattering collisions. These suggestions make possible a considerable improvement in the accuracy of future Monte Carlo calculations of the angular, energy, and temporal distributions of Ar+ and Ar++ ions passing through the electrode sheaths of low‐pressure, rf, and dc discharges in Ar. The cross sections necessary for a proper modeling of the energy dissipation in the gas and at the electrodes by fast neutral Ar atoms formed in symmetric‐charge‐transfer collisions of Ar+ and Ar++ with Ar are also reviewed.

Published in:

Journal of Applied Physics  (Volume:76 ,  Issue: 2 )