By Topic

“Green” process and productivity improvements in a GaAs light emitting diode wafer fab

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
Evans, K. ; CPSTG, Motorola Inc., Phoenix, AZ, USA ; AlCorn, T. ; Hadizad, P. ; Edwards, K.
more authors

A self directed process improvement team was initiated to streamline the GaAs light emitting diode (LED) wafer process flow and enhance product yields. “Green” benefits of this study to improve GaAs LED wafer processing yields included the elimination of a significant number of chemical processing steps. The new process is more environmentally “friendly” through the use of fewer and “milder” chemicals. Thus wafer production is enhanced with both a yield increase and a cost decrease due to lower levels of chemical usage

Published in:

Electronics and the Environment, 1995. ISEE., Proceedings of the 1995 IEEE International Symposium on

Date of Conference:

1-3 May 1995