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Low energy electron collision cross sections for silane

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2 Author(s)
Nagpal, Rajesh ; Advanced Plasma Research Group, Wright Laboratory, Wright Patterson Air Force Base, Dayton, Ohio 45433 ; Garscadden, Alan

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Electron collision cross sections for silane in the energy range 0–5 eV are presented. We show that the conventional two‐term solution of the Boltzmann equation is not correct for unfolding the cross sections from swarm data in pure silane, silane‐Ar, and silane‐Kr mixtures. A Monte Carlo method is used to derive the cross sections for the these systems and the two‐term solution is used in silane‐He mixtures. It is shown that experimental drift velocity data for the silane‐He system is a valuable adjunct for unfolding the silane cross sections from existing swarm data.

Published in:

Journal of Applied Physics  (Volume:75 ,  Issue: 2 )