Cart (Loading....) | Create Account
Close category search window
 

Optical emission characterization of CH4+H2 discharges for diamond deposition

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Gomez‐Aleixandre, C. ; Instituto Ciencia de Materiales, CSIC Universidad Autónoma, C12 Cantoblanco, 28049 Madrid, Spain ; Sanchez, O. ; Castro, A. ; Albella, J.M.

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.354488 

Methane and hydrogen discharges has been studied at different discharge frequencies (35 kHz, 13.56 MHz, and 2.45 GHz) and feeding gas ratios (up to 100% of methane) during diamond and diamond‐like deposition by plasma chemical vapor deposition techniques. Optical emission spectroscopy shows that the intensity of atomic hydrogen line (Hα) is the highest at the microwave frequency (2.45 GHz). In addition, at this frequency and low methane concentrations (≪7.5%) the emission of CH+ species is also detected, which has been associated to the presence of the diamond phase in the films. On the contrary, at the lower frequencies (35 kHz and 13.56 MHz), the emission spectra are dominated by neutral CH species that are supposed to be the precursor species in the diamond‐like films deposited at these frequencies.

Published in:

Journal of Applied Physics  (Volume:74 ,  Issue: 6 )

Date of Publication:

Sep 1993

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.