Cart (Loading....) | Create Account
Close category search window
 

Effect of structural incoherence on the low‐angle diffraction pattern of synthetic multilayer materials

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Xu, Zengli ; Department of Physics, University of Oregon, Eugene, Oregon 97403 ; Tang, Zizhou ; Kevan, S.D. ; Novet, Thomas
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.354857 

The sequential, layering techniques used to prepare multilayer materials result in significant structural incoherence due to deviations from the intended thicknesses within an elemental layer and local deviations from the average due to islanding of the depositing elements during deposition. We demonstrate that if the domain size of the structural incoherence is large compared with the wavelength of the scattering radiation, the structural incoherence manifests itself in the low‐angle diffraction pattern by attenuating the intensity of the subsidiary maxima relative to the Bragg maxima. We also show that the subsidiary maxima in the low‐angle diffraction pattern of a multilayer result from incomplete destructive interference from all of the interfaces, not just from the top and bottom surface of the film. A technique for incorporating structural incoherence when modeling the diffraction pattern of a multilayer structure is presented. The ability of this model to simulate the experimental diffraction pattern of an iron‐silicon multilayer is demonstrated.

Published in:

Journal of Applied Physics  (Volume:74 ,  Issue: 2 )

Date of Publication:

Jul 1993

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.