Cart (Loading....) | Create Account
Close category search window
 

Transport model of charged particle behavior in the afterglow region of a microwave generated oxygen plasma

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Wei, Ta‐Chin ; Department of Chemical Engineering, The Pennsylvania State University, 133 Fenske Laboratory, University Park, Pennsylvania 16802‐4400 ; Phillips, Jonathan

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.354873 

In this paper a model of charged particle behavior in a low‐pressure oxygen plasma is developed, and compared with experimental results. Agreement is excellent. It is demonstrated that the extremely high temperature (≳1 eV) of electrons in these plasmas results in diffusion totally dominating the transport of charged species. It is also shown that charged particle recombination on the walls of a quartz reactor is insignificant. Finally, the influence of the electron temperature profile must be fully considered for accurate results. This work complements an earlier model of radical behavior in these plasmas. Both are needed to fully understand materials modification in these plasmas, which has been shown to involve a synergism between radicals and charged species.

Published in:

Journal of Applied Physics  (Volume:74 ,  Issue: 2 )

Date of Publication:

Jul 1993

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.