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Irradiation nonuniformity due to imperfections of laser beams

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3 Author(s)
Murakami, M. ; Institute for Laser Technology, 2‐6 Yamada‐oka, Suita, Osaka 565, Japan ; Nishihara, K. ; Azechi, H.

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Intractable low‐mode nonuniformities caused by power imbalance or pointing error of beams are studied quasi‐analytically based on Skupsky’s axially symmetric model [S. Skupsky and K. Lee, J. Appl. Phys. 54, 3662 (1983)]. These nonuniformities can be improved by decreasing the imperfections σ, or by increasing the number of laser beams NB: deteriorated irradiation uniformity is shown to be proportional to σ/√NB. Criteria of these imperfections for high irradiation uniformity [≤1% root‐mean square (rms)] are then presented in terms of NB. The model is further extended to treat general asymmetric beam patterns. Optimization of beam pattern is also a central issue.

Published in:

Journal of Applied Physics  (Volume:74 ,  Issue: 2 )

Date of Publication:

Jul 1993

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