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Thermal stability of Ta/Ge superlattices studied by Raman spectroscopy

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2 Author(s)
Kumar, Sunil ; Department of Physics, Victoria University of Wellington, P.O. Box 600, Wellington, New Zealand ; Trodahl, H.J.

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The thermal behavior of Ta/Ge superlattices has been studied using Raman spectroscopy. The high‐frequency Raman spectra, obtained as a function of annealing temperature, reveal no significant change in the superlattice structure up to an anneal temperature of 400 °C. The interlayer diffusion at the Ta/Ge interfaces occurs at 500 °C followed by complete crystallization of the superlattice at 600 °C. Raman scattering from the folded acoustic modes of the superlattices was also employed to study the thermal behavior of superlattices, and the results thus obtained corroborate the above findings.

Published in:

Journal of Applied Physics  (Volume:73 ,  Issue: 4 )