Cart (Loading....) | Create Account
Close category search window
 

Measurements of electron energy distribution function in an asymmetric radio‐frequency discharge plasma

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Okuno, Yoshihiro ; Department of Electrical Engineering, Saga University, Honjo‐machi 1, Saga 840, Japan ; Ohtsu, Yasunori ; Komatsu, Chihiro ; Fujita, Hiroharu

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.353193 

Electron energy distribution functions in an asymmetric radio‐frequency (rf) discharge helium plasma were measured using an electrostatic energy analyzer looking opposite ways toward both the powered electrode and the bulk plasma. The grid and collector in the analyzer were connected to a series of parallel inductance‐capacitance (L‐C) filters to minimize rf interference. Electrons with high energies (15–30 eV) flowing from the electrode toward the bulk plasma were observed near the electrode. The energy is caused by the acceleration mechanism due to the rf sheath expansion, which should be the rf discharge sustaining mechanism. The electrons with high energies decreased in number with the distance from the electrode and became Maxwellian far from it. Electrons directed toward the electrode from the plasma were almost Maxwellian, and this situation was almost independent of the distance from the electrode.

Published in:

Journal of Applied Physics  (Volume:73 ,  Issue: 4 )

Date of Publication:

Feb 1993

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.