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Dynamical model of microscale electromechanical spatial light modulator

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2 Author(s)
Wetsel, Grover C. ; The University of Texas at Dallas, Richardson, Texas 75083 ; Strozewski, Kirk J.

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A model based on classical physics describing the nonlinear dynamics of a microscale spatial light modulator has been developed. The coupled electromechanical equations of motion have been solved for steady‐state, transient, and harmonic excitation. Comparison of theoretical predictions with the results of experiment for representative devices shows good agreement for small‐amplitude deflections, large‐amplitude deflections, and unstable transitions.

Published in:

Journal of Applied Physics  (Volume:73 ,  Issue: 11 )