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Preparation and ferroelectric properties of PbZr0.53Ti0.47O3 thin films by spin coating and metalorganic decomposition

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5 Author(s)
Spierings, G.A.C.M. ; Philips Research Laboratories, P.O. Box 80.000, Eindhoven, The Netherlands ; Ulenaers, M.J.E. ; Kampschoer, G.L.M. ; van Hal, H.A.M.
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Films with a composition PbZr0.53Ti0.47O3 were prepared on different platinum bottom electrodes using a spin‐coating process followed by metalorganic decomposition. The film morphology and structure were characterized by scanning electron microscopy and x‐ray diffraction analysis. The morphology was strongly influenced by the heat cycle used to form the PbZr0.53Ti0.47O3 layer. Fast heating and high‐fire temperatures produced smooth films, while slow heating and low‐fire temperatures gave films having a rosette perovskite phase and an inter‐rosette second phase. The films were characterized electrically by measuring hysteresis loops and capacitance and conductance versus bias voltage and by pulse‐switching measurements. The dependence of the switched and nonswitched polarization on the number of switching cycles (i.e., the fatigue behavior) is found to be much better for fast‐heated than for slowly heated films. Switching lifetimes exceeding 1011 cycles were measured. The type of platinum bottom electrode used was found to have a large influence on the ferroelectric properties of the lead zirconate titanate films.

Published in:

Journal of Applied Physics  (Volume:70 ,  Issue: 4 )