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Potential formation near powered electrode in radio‐frequency‐driven discharge

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2 Author(s)
Okuno, Yoshihiro ; Department of Electrical Engineering, Saga University, Honjo‐machi 1, Saga 840, Japan ; Fujita, Hiroharu

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Potential formation at the crest and trough phases in a radio‐frequency (rf) oscillation (13.56 MHz) near a powered electrode has been observed for the first time in a rf‐driven discharge plasma on the basis of a novel method of an emissive probe. The spatial profile at the crest phase was found to form an electron sheath extremely different from the conventional one, whereas the profile at the trough phase forms apparently a conventional ion sheath. The sheath thickness estimated from the time‐averaged potential profile was also discussed by comparing with the spatial profiles of plasma density and optical emission.

Published in:

Journal of Applied Physics  (Volume:70 ,  Issue: 2 )