By Topic

Potential formation near powered electrode in radio‐frequency‐driven discharge

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
2 Author(s)
Okuno, Yoshihiro ; Department of Electrical Engineering, Saga University, Honjo‐machi 1, Saga 840, Japan ; Fujita, Hiroharu

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.349666 

Potential formation at the crest and trough phases in a radio‐frequency (rf) oscillation (13.56 MHz) near a powered electrode has been observed for the first time in a rf‐driven discharge plasma on the basis of a novel method of an emissive probe. The spatial profile at the crest phase was found to form an electron sheath extremely different from the conventional one, whereas the profile at the trough phase forms apparently a conventional ion sheath. The sheath thickness estimated from the time‐averaged potential profile was also discussed by comparing with the spatial profiles of plasma density and optical emission.

Published in:

Journal of Applied Physics  (Volume:70 ,  Issue: 2 )