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Investigation of the thermal dissociation of PH3 and NH3 using quadrupole mass spectrometry

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4 Author(s)
Baillargeon, J.N. ; Center for Compound Semiconductor Microelectronics, Electrical Engineering Research Laboratory and Coordinated Sciences Laboratory, University of Illinois at Urbana‐Champaign, Urbana, Illinois 61801 ; Cheng, K.Y. ; Jackson, S.L. ; Stillman, G.E.

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The thermal dissociation of PH3 and NH3 injected through a Ta‐based high‐pressure gas‐injection cell were studied. Using a quadrupole mass spectrometer, the Ta was found to effectively dissociate the PH3 into primarily P2, P4, and H2 molecules with an injector temperature as low as 550 °C. The introduction of NH3 through this same injector resulted in dissociation into N2 and H2 for an injector temperature greater than 900 °C. When NH3 and PH3 were coinjected, again P2, P4, N2, and H2 were the primary molecules produced; however, an additional dimer, PN, was also detected. The PN concentration was maximum at a cell temperature of 700 °C. This dimer was found to be an effective source for introducing nitrogen as an isoelectronic trap in GaP.

Published in:

Journal of Applied Physics  (Volume:69 ,  Issue: 12 )

Date of Publication:

Jun 1991

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