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Boron compounds as a dominant source of alpha particles in semiconductor devices

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4 Author(s)
Baumann, R. ; ULSI Technol. Dev. Center, Texas Instrum. Japan Ltd., Ibaraki, Japan ; Hossain, T. ; Murata, S. ; Kitagawa, I.

The interaction of cosmic ray neutrons and boron is demonstrated as the dominant source of alpha particles and other radiations in electronic devices utilizing borophosphosilicate glass (BPSG). A simple process modification is proposed to significantly reduce this intense source of ionizing radiation without compromising the reflow and passivation properties of BPSG.

Published in:

Reliability Physics Symposium, 1995. 33rd Annual Proceedings., IEEE International

Date of Conference:

4-6 April 1995