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Congruent charge-injection spectrum from independent measurements of fatigue and imprint in ferroelectric thin films

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2 Author(s)
Jiang, A.Q. ; Department of Microelectronics, ASIC and System State Key Laboratory, Fudan University, Shanghai 200433, China ; Tang, T.A.

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The fundamental physics of fatigue and imprint in ferroelectric thin films is pertinent to the by-electrode charge injection. The detectable charge injection depends on the applied voltage and time. However, a broad-time description of the charge injection is still lacking. It is not clear if the charge-injection spectra are derivable and comparable from two independent measurements. In our works, we obtained two charge-injection spectra from discrete fatigue and imprint measurements with a time span of more than eight orders of magnitude. The charge-injection spectra are in agreement with the direct measurements of charge-injection current transients under/after different biasing voltages. All results are congruently described by a series of analytical equations derived from the assumption of interfacial Schottky emission for the films with the presence of interfacial passive layers. The initial time below which the charge injection is minor is found to be of the order of 2.5 μs under -6.0 V on the top electrode but ten times slower under 6.0 V for Pt/IrO2/Pb(Zr,Ti)O3/IrO2/Pt thin-film capacitors.

Published in:

Journal of Applied Physics  (Volume:105 ,  Issue: 6 )