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Comparison of the method and time-domain thermoreflectance for measurements of the cross-plane thermal conductivity of epitaxial semiconductors

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8 Author(s)
Koh, Yee Kan ; Department of Materials Science and Engineering, and Frederick Seitz Materials Research Laboratory, University of Illinois, Urbana, Illinois 61801, USA ; Singer, Suzanne L. ; Kim, Woochul ; Zide, Joshua M.O.
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The technique and time-domain thermoreflectance (TDTR) are two experimental methods capable of measuring the cross-plane thermal conductivity of thin films. We compare the cross-plane thermal conductivity measured by the method and TDTR on epitaxial (In0.52Al0.48)x(In0.53Ga0.47)1-xAs alloy layers with embedded ErAs nanoparticles. Thermal conductivities measured by TDTR at low modulation frequencies (∼1 MHz) are typically in good agreement with thermal conductivities measured by the method. We discuss the accuracy and limitations of both methods and provide guidelines for estimating uncertainties for each approach.

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Journal of Applied Physics  (Volume:105 ,  Issue: 5 )