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Magnetic field probes for use in radio frequency plasma

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3 Author(s)
Reilly, Michael P. ; Department of Nuclear, Plasma, and Radiological Engineering, University of Illinois at Urbana-Champaign, 104 S. Wright Street, 216 Talbot Laboratory, MC-234 Urbana, Illinois 61801, USA ; Lewis, William ; Miley, G.H.

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.3136907 

An impedance analyzer has been used in the characterization of a magnetic induction probe (B-dot probe) for use in plasma. The role of the impedance analyzer was to determine the frequency response of a B-dot probe up to 100 MHz. The probe was specifically designed to take measurements in rf plasma driven at 13.56 MHz. Probe sensitivity and calibration are considered based on the impedance values obtained when a B-dot probe is swept over a wide frequency range. Effects such as unbalanced loads based on transmission line inductances and termination impedance are shown to be limiting factors on the probes useful frequency range. The use of an impedance analyzer allows these effects to readily be characterized.

Published in:

Review of Scientific Instruments  (Volume:80 ,  Issue: 5 )

Date of Publication:

May 2009

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