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Browse Journals & Magazines > Journal of Vacuum Science & T ...> Volume:27 Issue:3 Help

Comparative study on structural and optical properties of ZnO films grown by metalorganic molecular beam deposition and metalorganic chemical vapor deposition

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6 Author(s)
Terasako, Tomoaki ; Faculty of Engineering, Ehime University, 3 Bunkyo-cho, Matsuyama 790-8577, Japan ; Yura, Shinichiro ; Azuma, Suguru ; Shimomura, Satoshi
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Polycrystalline zinc oxide films were grown on glass substrates by low pressure metal organic chemical vapor deposition (LP-MOCVD) and metal organic molecular beam deposition (MOMBD) using diethlyzinc and water as precursors. With increasing substrate temperature (TS), preferential growth direction of the LP-MOCVD films changed from c-axis direction to a-axis direction, while that of the MOMBD films changed from random direction to c-axis direction. Photoluminescence (PL) spectra of the LP-MOCVD films exhibited an orange band emission related to interstitial oxygen atoms, while those of the MOMBD films exhibited a green band emission related to oxygen vacancies. This PL result suggests that the LP-MOCVD films are in oxygen excess condition, but the MOMBD films are in oxygen deficient condition. Photoacoustic measurements revealed that the energy level of the nonradiative center formed in the LP-MOCVD films is deeper than that in the MOMBD films.

Published in:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:27 ,  Issue: 3 )

Date of Publication: May 2009

Page(s):
1609 - 1614
ISSN :
1071-1023
Digital Object Identifier :
10.1116/1.3130155
Product Type:
Journals & Magazines
Date of Current Version :
24 June 2009
Issue Date :
May 2009

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