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Micro-ink-jetting of silver nanoparticles on low temperature cofired ceramic substrates for drop-on-demand metallization

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5 Author(s)
Liang, Y.N. ; Singapore Institute of Manufacturing Technology (SIMTech), 71 Nanyang Drive, Singapore 638075, Singapore ; Xuechuan Shan ; Gian, P.W. ; Lok, B.K.
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The authors demonstrated the feasibility of patterning conductive inks on sintered low temperature cofired ceramic (LTCC) substrates using ink-jetting technology. The objective of this study is to realize drop-on-demand metallization on plain or structured ceramic substrates. The sintered LTCC substrates can be viewed as a porous ceramic medium with rough surface finishes, and its porosity is one of the major impediments for achieving high pattern quality via ink-jetting in terms of pattern uniformity and resolution. To improve the uniformity and minimize the dimension of ink-jetted patterns, the authors proposed and demonstrated three technical solutions, i.e., ink-jetting on patterned ceramic substrates, heating substrates during ink-jetting, and coating substrates with a dielectric layer. Improvement in resolution and uniformity of ink-jetting was achieved using the proposed approaches.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:27 ,  Issue: 3 )