Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.3072886
The atomic force microscopy (AFM)-based mechanical nanoscratching method is employed to be integrated with self-assembly process on the surface of silicon (111) forming a novel fabricating approach: An AFM diamond tip is used to scratch the sample surface, forming complex structures with dimensions of several microns. Then the same sample is immersed into the hexadecane solution and heated to
Published in:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
(Volume:27
,
Issue:
3
)
Date of Publication: May 2009