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Application of ion-induced carbon nanocomposite fibers to magnetic force microscope probes

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6 Author(s)
Sugita, Yoshitaka ; Department of Environmental Technology, Graduate School of Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan ; Kitazawa, M. ; Zamri M.Yusop, M. ; Tanemura, Masaki
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Small-scale batch fabrication of Co-included carbon nanofibers (Co-CNFs) onto commercially available Si cantilevers for scanning probe microscope by an Ar+-ion-irradiation method with a simultaneous Co supply was demonstrated (eight chips/batch). As confirmed by scanning and transmission electron microscopes equipped with energy dispersive x-ray spectroscopy, Co-CNFs were fibrous and contained Co and C. With increasing the Co supply rate, Co-CNFs decreased in length from ∼600 to ∼400 nm, whereas their diameter was almost independent of the Co supply rate, 20–30 nm. As proven by magnetic force microscope (MFM) measurements using the Co-CNF probes, they were applicable as MFM probes. Since various metals including alloys can be incorporated into CNFs, this ion-irradiation method with a simultaneous metal supply was believed to be quite promising for the functionalization of CNF probes for a variety of applications.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:27 ,  Issue: 2 )