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Fabrication of surface plasmon waveguides on thin CYTOP membranes

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3 Author(s)
Fong, Norman ; Department of Electronics, Carleton University, 1125 Colonel By Drive, Ottawa, Ontario K1S 5B6, Canada ; Berini, Pierre ; Niall Tait, R.

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The fabrication of a membrane supported long-range surface plasmon polariton waveguide for use as a biosensor is described. This type of device can be completely immersed in the sensing environments to create symmetrical waveguide surroundings. The membrane is created from the fluoropolymer CYTOP which has strong physical properties and a low index of refraction. The fabrication steps of this device are described along with examples of completed structures.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:27 ,  Issue: 4 )