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Rapid three-dimensional imaging of defect distributions using a high-intensity positron microbeam

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7 Author(s)
Oshima, N. ; National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan ; Suzuki, R. ; Ohdaira, T. ; Kinomura, A.
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An intense positron microbeam generated by an electron accelerator has been developed for obtaining three-dimensional positron lifetime mappings in a sample to permit visual evaluation of defect distributions. The beam diameter at the sample was 80–100 μm. The counting rate of the positron annihilation γ rays used to measure positron lifetime was as large as 3×103 s-1. Three-dimensional imaging was demonstrated of positron lifetimes in a SiO2 sample, which was irradiated with ion beams through a mesh mask. The time to obtain a single image (3500 pixels for an area of 2.5×3.5 mm2) was 0.5–1 h.

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Applied Physics Letters  (Volume:94 ,  Issue: 19 )