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Nanoporous energetic silicon is a promising new material for on-chip integration of energetic materials. We demonstrate several advances in the integration of nanoporous energetic silicon, including monolithic integration of a hotwire initiator on nanoporous energetic silicon, with 2.8-V ignition. We also demonstrate lithographically patterned arrays of energetic devices that are independently addressable through integrated initiators with no sympathetic ignition. Monolithic integration of the energetic material with a surface micromachined microelectromechanical systems sensor is also shown. The performance and failure mechanisms of the hotwire initiator are examined, and preliminary measurements of the thrust and propagation velocity are reported.
Date of Publication: Aug. 2009