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Preparation of Uniaxial Permalloy Films by Cathodic Sputtering on Glass and Metal Substrates

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2 Author(s)
Flur, B.L. ; IBM Corporation, Components Division, Poughkeepsie, New York 12602 ; Riseman, J.

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Thin magnetic films have been prepared by cathodic sputtering on glass and metal substrates. The influence of the ferromagnetic cathode on the orienting magnetic field, as well as on the resulting magnetic behavior of the films is discussed. Use of a ``thin'' foil cathode is shown to be a simple method for minimizing the distorting effect of the cathode. Wall coercive force, anisotropy field, skew, and dispersion values are given for these films. Pulse behavior of a high‐density bit plate in the biased mode of operation is also given.

Published in:

Journal of Applied Physics  (Volume:35 ,  Issue: 2 )